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Keywords: Transient temperature control
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Proceedings Papers

Proc. ASME. AJTEC2011, ASME/JSME 2011 8th Thermal Engineering Joint Conference, T30033, March 13–17, 2011
Publisher: American Society of Mechanical Engineers
Paper No: AJTEC2011-44574
... that the Fourier number of the layer between the control heater and the active layer is the key parameter to minimize the temperature fluctuations. We also successfully demonstrate suppression of the temperature change in a MEMS-based experimental setup. Transient temperature control optimal control...